Get pricing and technical specifications for your project
Typical response time: Within 24 hours
The Maglev Vacuum Pump leverages active magnetic bearing technology to achieve 100% oil-free, contamination-free vacuum for sensitive industrial processes. With ultimate vacuum up to 70 KPa and pumping speeds from 50–500 m³/h, CIGU maglev vacuum pumps serve semiconductor fabrication, pharmaceutical manufacturing, and precision machining.
The maglev vacuum pump employs frictionless magnetic levitation to power a high-speed turbomolecular pumping mechanism without any lubricating oil, delivering ultra-clean, stable vacuum levels with minimal vibration and maintenance for the most sensitive production environments.
| Model | Pumping Speed m3/h |
Ultimate Vacuum KPa |
Motor Power kW |
Inlet Dia. mm |
|---|---|---|---|---|
| CG/VP-50 | 50 | 70 | 5.5 | 50 |
| CG/VP-200 | 200 | 70 | 18.5 | 100 |
| CG/VP-500 | 500 | 70 | 45 | 150 |
Ambient Temperature
-10~45°C
Environment Humidity
<95% RH
Ultimate Vacuum
70 KPa
Ultra-clean vacuum for wafer processing, etching, and deposition in semiconductor fabrication facilities
Oil-free vacuum for freeze-drying, filtration, and sterile manufacturing processes in pharma production
Stable vacuum clamping and suction for CNC machining and precision parts manufacturing
Laboratory research, composite material manufacturing, packaging, and other processes requiring clean, reliable vacuum
Common questions about purchasing and implementing Maglev Vacuum Pumps
Standard lead time is 8-12 weeks. Custom configurations may require up to 16 weeks. Contact our sales team for specific timelines.
Yes, our technical team provides full on-site installation and commissioning support including cleanroom protocols. We also offer remote guidance and training for your operations staff.
Standard 2-year warranty covering parts and labor. Extended warranty options are available on request.
Yes. CIGU maglev vacuum pumps are designed for cleanroom-compatible operation with minimal vibration, low noise, and zero oil emission. A dedicated account manager is assigned to each client.
We offer 24/7 remote monitoring, preventive maintenance programs, spare parts supply, and on-site service contracts. A dedicated account manager is assigned to each client.
Have more questions? Contact our technical team